This device measures the thickness of wafers and display panels after partial processes such as wafer slicing, grinding, thinning, and slicing. Can synchronously test the TTVBOWWRAP/SORI and other parameter errors of the material itself.
Project |
Performance index |
使用陶瓷盘尺寸 |
φ260/268/305/360mm, Automated loading and unloading of robotic arms |
设备测量分辨率 |
0.005um |
测量重复性 |
≤0.5um |
测量精度 |
≤ 1um (measurement comparison accuracy is affected by ceramic disc and wax layer) |
测量范围 |
0-1000um |
测量点位数 |
1. 3, 5, 9... N (number of points can be set) |
测量效率 |
Fastest 18sec/p, 5-point sampling |
测量带宽 |
Max 10000Point/sec |
测量材质 |
Transparent, non transparent, smooth, rough samples such as GaN, GaAs, Si, SiN, Sic, etc |