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Wafer thickness measuring instrument
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Wafer thickness measuring instrument

Wafer thickness measuring instrument

This device measures the thickness of wafers and display panels after partial processes such as wafer slicing, grinding, thinning, and slicing. Can synchronously test the TTVBOWWRAP/SORI and other parameter errors of the material itself.

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Performance index

使用陶瓷盘尺寸

φ260/268/305/360mm Automated loading and unloading of robotic arms

设备测量分辨率

0.005um

测量重复性

0.5um

测量精度

1um (measurement comparison accuracy is affected by ceramic disc and wax layer)

测量范围

0-1000um

测量点位数

1. 3, 5, 9... N (number of points can be set)

测量效率

Fastest 18sec/p, 5-point sampling

测量带宽

Max 10000Point/sec

测量材质

Transparent, non transparent, smooth, rough samples such as GaN, GaAs, Si, SiN, Sic, etc

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